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Specifications
Page 3 of 4
Sample stage
|
Sample stage |
|
Stepper motors (National instruments) |
± 6 mm |
|
Piezoelectric motors (PI) |
± 40 um |
The sample stage consist of two stepper motors (providing X and Y movement) and piezoelectric PI motors providing X and Y movement for scanning mode.
Last Updated on Wednesday, 13 December 2023 13:54
