SPELEEM microscope

Microprobe spectroscopy (mu-XPS).

The last two projectors, P2 and P3, are used to image the dispersive plane of the analyser. The dispersive plane appears as a line, and its intensity profile represents the photoemission spectrum. Note that the energy slit is not inserted. The probed area is selected by the field limiting aperture inserted in the image plane after the objective lens.Micro-XPS mode allows fast acquisition times while reaching the best energy resolution of the SPELEEM, 0.2eV.