Beamline description
Motorized manipulator
The motorized seven-axis manipulator (Huber, Germany) is composed of four linear and three rotational stages used to provide proper orientation of the analyzed sample surface and X-ray monitoring detectors, as required by the experiment to be conducted. In particular, the sample manipulation allows three translations (‘X’, ‘Y’, ‘Z’) in the Cartesian geometry and rotation around two axes (‘Theta’ and ‘Phi’). One additional rotational axis (‘2Theta’) and one linear stage (‘Diode’) are used for the movement/translation of X-ray monitoring detectors with respect to the direction of the SR beam or/and sample surface.
In order to achieve a high-precision positioning for GIXRF and XRR measurements, the two main axes (‘Theta’ and ‘2Theta’) of the two-circle goniometer of the seven-axis manipulator are equipped with absolute encoders (Renishaw, UK).
Layout of the seven-axis manipulator (position: ‘Theta’=0, ‘2Theta’=0 and ‘Phi’=0).
Schematic drawing prepared for the IAEA by Huber Diffraktionstechnik GmbH &Co
Specifications of the seven (7) axis manipulator
| Specification | Units | ‘’Theta’’ | ‘’2Theta’’ | ‘’Phi’’ | ‘’Diode’’ | ‘’Z’’ | ‘’X’’ | ‘’Y’’ |
| Repeatability | [“]1 | 2.3 | 7.0 | 2.5 | ||||
| Reversal error | [“]1 | 4.2 | 9.4 | 3.1 | ||||
| Optimal backlash distance | [°] | 0.1 | 0.1 | 0.3 | ||||
| Pitch | [“] | 32.52 | 27.53 | 9.93 | ||||
| Yaw | [“] | 1.92 | 14.23 | 313 | ||||
| Roll | [“] | 1.82 | 11.94 | 31.34 | ||||
| Motor resolution | [°] | 0.00005 | 0.00005 | 0.00025 | ||||
| mm | 0.00025 | 0.0005 | 0.00025 | 0.00025 | ||||
| Motor maximum velocity | [°] | 0.3 | 0.3 | 0.5 | ||||
| mm | 0.5 | 0.5 | 0.5 | 0.5 | ||||
| Motor base velocity | [°] | 0.015 | 0.015 | 0.025 | ||||
| mm | 0.05 | 0.05 | 0.025 | 0.025 |
2 Measured for 50 mm translation
3 Measured for 110 mm translation
4 Measured for 90 mm translation
Base System
The UHV chamber is mounted on a frame that allows its translational and rotational positioning using three (two linear and one rotational) stages, whereas the frame is movable via wheels. It consists of:
- Support frame that it is a welded steel frame with six adjustable feet and four jacking castors;
- Lifting stage (base-Y) placed on top of the frame allows motorized positioning of the other two stages and the chamber within +/- 50 mm;
- Linear horizontal stage (base-X) placed on top of the lifting stage allows movement of the rotational stage including the chamber within +/- 12 mm; the movement is perpendicular to the beam direction;
- Rotational stage (base-rot) that performs the rotary adjustment of the chamber within a range of +/- 5°.
Specifications of the motor stages for the base system
| Degrees of freedom | Resolution | Reproducibility | Adjusting range |
| base-X | < 0.05 mm | < 0.1mm | +/- 12 mm |
| base-Y | < 0.05 mm | < 0.1mm | +/- 50 mm |
| base-rot | <0.005° | <0.01° | +/- 5° |
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Elettra-Sincrotrone Trieste S.C.p.A. di interesse nazionale Strada Statale 14 - km 163,5 in AREA Science Park 34149 Basovizza, Trieste ITALY Tel. +39 040 37581 - Fax. +39 040 9380902 Anagrafe Nazionale Ricerche Cod. 51779CRP partita IVA 00697920320 |
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