Scanning photoelectron microscope (SPEM)

Microscope performance

Lateral resolution: below 50nm (depending on the monochromator slits, energy and zone plate diameter and last zone width)

Energetic resolution and relative intensity for different settings:

analyzer pass energy (V)	monochromator slit size (µm)	total energy resolution (eV)	relative intensity to PE=20V slit=30ìm
5	5	0.18	0.04
5	10	0.22	0.07
5	20	0.25	0.15
5	30	0.33	0.2
10	10	0.22	0.16
10	20	0.25	0.35
10	30	0.33	0.47
20	10	0.35	0.35
20	20	0.35	0.75
20	30	0.37	1

Photon flux in the focus: >10⁹ph s^-1